Speaker
Description
To achieve the high gravitational wave strain required for Einstein Telescope, vibration isolation systems must meet stringent performance requirements, particularly at low frequencies. This demands inertial sensors that are both highly sensitive and mass producable, as large facilities require hundreds of units with consistent performance.
Similar challenges arise in the semiconductor industry, where minimizing vibration is critical for advanced fabrication. The CHiPS (Compact High-Performance Sensors) project addresses these needs by developing compact horizontal and vertical accelerometers. These sensors combine low-resonance mechanics with an interferometric readout. We are developing a miniaturized Homodyne Quadrature Interferometer (HoQI) with integrated actuation, enabling both open-loop and closed-loop operation to balance sensitivity and dynamic range depending on application requirements. The target performance of the lockable system is sub-pm/√Hz sensitivity at frequencies below 10 Hz.